If your laser
what you expect
you need to see what
the beam looks like
The 1st of its kind
T h ey w ere see n m ostly via te m p orary storefro nt
sp aces a n d tra velin g ex hibitors.
It’s well known that:
t Beams change over time
t Focus spot shifts over power changes
t Intensity distribution changes with aging optics
See for yourself, on your laser, at your site. Call for a demo.
Here is the same beam over time
(thickness: 0.1mm). In addition, micro-grooving was performed on a borosilicate glass
FIGURE 3 shows samples of the hole-drilling
and micro-grooving. The roundness of both
holes was excellent, which indicates that
drilling with high form accuracy was achieved
by the helical drilling method. Further, the
inner surfaces of the holes and the groove
were smooth and free from re-melted matter,
proving that ablation with reduced thermal
effects was achieved not only on the stain-
less steel, but also on the SiC wafer and
By using the DUV laser beam and optimized optical system and precisely controlling the beam trajectory, we achieved
high-quality, 10µm-diameter drilled holes
with an aspect ratio of 10 and 10µm-wide
and deep micro-grooving, which conventionally had been very
hard to accomplish.
To satisfy the need for finer laser microfabrication, we developed
an optical system that uses a short-pulse DUV laser, with which
drilling characteristics of various differ-
ent materials were identified. In addition, a
microfabrication test with a DUV laser and a
helical drilling method was conducted that
achieved ultrafine hole-drilling of a minimum
of 10µm in diameter and an aspect ratio of a
maximum of 10.
This laser optical system is installed in the
ABLASER-DUV laser microfabrication sys-
tem (FIGURE 4). We plan to continue technical
development so that we will be able to offer
optimal solutions to satisfy the need for finer
microfabrication with higher quality in various industrial fields. ✺
1. K. Nakagawa et al., “Microdrilling technology using short
pulsed-laser,” Mitsubishi Heavy Industries Technical Review, 52, 3
2. Y. Imamiya et al., “Development of microfabrication technology
using DUV laser,” Mitsubishi Heavy Industries Technical Review, 53, 4 (2016).
3. See https://goo.gl/fchdjw.
4. See https://goo.gl/HGRXit.
YUJI IMAMIYA, SATORU AKAMA, YOSHIHITO FUJITA, and HARUHIKO NIITANI
are with the Advanced Manufacturing System Development Center at Mitsubishi Heavy
Industries Machine Tool, Shiga, Japan; www.mhi-machinetool.com.
FIGURE 4. The ABLASER-DUV laser
microfabrication system features a short-
pulse DUV laser.